Sentaurus Process
1. Getting Started

1.1 Overview
1.2 File Types
1.3 Starting Sentaurus Process

Objectives

• To present an overview of the features of Sentaurus Process.
• To identify the file types used by Sentaurus Process.
• To demonstrate how to run Sentaurus Process.

1.1 Overview

Sentaurus Process is a complete and highly flexible multidimensional process modeling environment. With its modern software architecture, it constitutes a new-generation tool and a solid base for process simulation. Calibrated to a wide range of the latest experimental data using proven calibration methodology, Sentaurus Process offers unique predictive capabilities for modern silicon and nonsilicon technologies.

1.1.1 Working with This Module

In this module, you are guided through a series of examples of increasing complexity. The most widely used Sentaurus Process commands are introduced in the context of these examples.

The module discusses only keywords and options that are used in the given examples. For a complete command reference, refer to the Sentaurus Process User Guide.

A listing of the command file of Sentaurus Process is given at the end of each section in the form of an HTML link. You are encouraged to create a local copy of the command file from the browser (File > Save As) and to run it. Some examples are given as Sentaurus Workbench package files; after creating a local copy, the files can be opened with Sentaurus Workbench.

1.2 File Types

The main file types used in Sentaurus Process are:

• Sentaurus Process command file (*.cmd)
  This is the main input file type for Sentaurus Process. It contains all the process steps and can be edited. This file is referred to as the command file or input file.
  
  
• Log file (*.log)
  Sentaurus Process generates this file during a run. It contains information about each process step, and the models and values of physical parameters used in it. The amount of information written to the log file can be controlled by certain parameters specified in the Sentaurus Process command file.
  
  
• TDR boundary file (*_bnd.tdr)
  This Synopsys-specific format stores the geometry of the device and is usually saved by users at the end of a simulation. This file is used as the input file for the meshing engines (Sentaurus Mesh and Noffset3D) and can be loaded into Tecplot SV for viewing.
  
  To open a TDR file, open a terminal window and launch the TDR file viewer with the command:
  
  tecplot_sv <name_of_the_file>.tdr
  
  
• TDR grid and doping file (*_fps.tdr)
  This single file stores two kinds of information: One is information about the geometry of the device and the grid. The other is information about the distribution of doping and other datasets in the device. A TDR file can be reloaded into Sentaurus Process to continue the simulation and can be loaded into Tecplot SV for visualization.
  

  Besides simulation grid and data, a TDR file stores additional information to properly restart a simulation.

• Doping and refinement file (*_msh.cmd)
  This file stores doping and mesh refinement information and, along with the boundary file, it is used as input for the meshing engines. This file is usually saved by users at the end of a simulation.
  
  
• 1D PLX file (*.plx)
  This file is used for saving 1D distributions of the doping concentration or other fields in a specified cross section. This file can be viewed by loading into Inspect.
  
  
• Log file (no default extension, recommended *.scm)
  This file can be generated optionally to log all the Scheme commands dispatched to the Sentaurus Structure Editor library when it is selected as the engine to perform 3D etching and deposition steps.

1.3 Starting Sentaurus Process

To start Sentaurus Process in interactive mode, type the following on the command line:

> sprocess

Sentaurus Process displays version and host information, followed by the Sentaurus Process command prompt.

****************************************************************************
***                          Sentaurus Process                           ***
***                          Version G-2012.06                           ***
***                         (1.0, amd64, linux)                          ***
***                                                                      ***
***                       Copyright (C) 1993-2002                        ***
***          The board of regents of the University of Florida           ***
***                       Copyright (C) 1994-2012                        ***
***                            Synopsys, Inc.                            ***
***                                                                      ***
***  This software and the associated documentation are confidential     ***
***  and proprietary to Synopsys, Inc.  Your use or disclosure of this   ***
***  software is subject to the terms and conditions of a written        ***
***  license agreement between you, or your company, and Synopsys, Inc.  ***
****************************************************************************

Compiled Tue Apr 10 10:39:59 PDT 2012 on tcadprod5

      Started at: Tue Jan 24 11:06:00 2012 (CEST)
       User name: nanni
       Host name: nanni-6930p-lnx
             PID: 6281
    Architecture: x86_64
Operating system: Linux rel. 2.6.18-128.el5 ver. #1 SMP Wed Dec 17 11:41:38
EST 2008

No inputfile given - enter command line mode
            sprocess: Checked Out
           Floops-1D: Checked Out

Loading models file: /u/isedist/sentaurus/tcad/G-2012.06/lib/sprocess-20.0.1/
TclLib/SPROCESS.models... done.
sprocess> 

Commands can be now entered sequentially at the prompt.

Commands also can be saved in a command file, written by users or using Ligament. To run Sentaurus Process in batch mode, type:

> sprocess input_fps.cmd

The command file is checked for correct syntax and then the commands are executed in sequence until the simulation is stopped by the command exit or the end of the file is reached. Syntax-checking can be switched off with the command-line option -n:

> sprocess -n input_fps.cmd